High throughput oxide lattice engineering by parallel laser molecular-beam epitaxy and concurrent x-ray diffraction
High throughput oxide lattice engineering by parallel laser molecular-beam epitaxy and concurrent x-ray diffraction
复制标题
DOI：
10.1063/1.1926927
复制
发表时间：
2005-04
影响因子：
1.6
通讯作者：
M. Ohtani;M. Lippmaa;T. Ohnishi;M. Kawasaki
中科院分区：
文献类型：
--
作者：
M. Ohtani;M. Lippmaa;T. Ohnishi;M. Kawasaki
基于组合方法学的概念，研制了用于制备原子控制氧化物超晶格的激光分子束外延(LMBE)系统和测量空间分辨X射线衍射谱的X射线衍射仪。LMBE室有两个移动掩模、一个自动靶台、一个衬底加热激光器和一个原位扫描反射高能电子衍射系统。具有曲面单色器和二维探测器的X射线衍射仪用于快速同时绘制X射线衍射强度图，探测器的两个轴对应于衍射角和样品中的位置。
A laser molecular-beam epitaxy (LMBE) system for the fabrication of atomically controlled oxides superlattices and an x-ray diffractometer that measures spatially resolved x-ray diffraction spectra have been developed based on the concept of combinatorial methodology. The LMBE chamber has two moving masks, an automated target stage, a substrate heating laser, and an in situ scanning reflection high-energy electron diffraction system. The x-ray diffractometer with a curved monochromator and two-dimensional detector is used for rapid concurrent x-ray diffraction intensity mapping with the two axes of the detector corresponding to the diffraction angle and a position in the sample.