Silicon Nitride Waveguides with Intrinsic Single-Photon Emitters for Integrated Quantum Photonics
Silicon Nitride Waveguides with Intrinsic Single-Photon Emitters for Integrated Quantum Photonics
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DOI：
10.1021/acsphotonics.2c00750
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发表时间：
2022-05
期刊：
影响因子：
7
通讯作者：
Alexander Senichev;Samuel Peana;Zachariah O. Martin;O. Yesilyurt;Demid V. Sychev;A. Lagutchev;A. Boltasseva;V. Shalaev
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文献类型：
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作者：
Alexander Senichev;Samuel Peana;Zachariah O. Martin;O. Yesilyurt;Demid V. Sychev;A. Lagutchev;A. Boltasseva;V. Shalaev
最近在氮化硅(SiN)1中发现的室温本征单光子发射体为量子光源与成熟的SiN光子平台的无缝单片集成提供了独特的机会。在这项工作中，我们开发了一种新的方法来实现具有本征量子发射器的低自荧光SiN制成的平面光波导，并证明了单光子发射耦合到波导模中。观测到的来自这些发射体的发射耦合与数值模拟是一致的。通过二阶自相关测量证实了单光子发射到波导模的耦合，该光通过光栅耦合器从光子芯片输出。对二阶自相关直方图进行拟合，得到𝑔𝑔(2)(0)=0.35±0.12，未经光谱滤波或背景校正，输出光子速率为1 0 4次/秒。这证明了第一次成功地将来自SIN中本征单光子发射器的光子耦合到由相同材料制成的单片集成波导。我们的工作结果为实现可扩展的、技术就绪的量子光子集成电路与固态量子发射器有效地接口铺平了道路。
: The recent discovery of room temperature intrinsic single-photon emitters in silicon nitride (SiN) 1 provides the unique opportunity for seamless monolithic integration of quantum light sources with the well-established SiN photonic platform. In this work, we develop a novel approach to realize planar waveguides made of low-autofluorescing SiN with intrinsic quantum emitters and demonstrate the single-photon emission coupling into the waveguide mode. The observed emission coupling from these emitters is found to be in line with numerical simulations. The coupling of the single-photon emission to a waveguide mode is confirmed by second-order autocorrelation measurements of light outcoupled off the photonic chip by grating couplers. Fitting the second-order autocorrelation histogram yields 𝑔𝑔 ( 2 ) (0) = 0.35 ± 0.12 without spectral filtering or background correction with an outcoupled photon rate of 10 4 counts per second. This demonstrates the first successful coupling of photons from intrinsic single-photon emitters in SiN to monolithically integrated waveguides made of the same material. The results of our work pave the way toward the realization of scalable, technology-ready quantum photonic integrated circuitry efficiently interfaced with solid-state quantum emitters.