M. Nakamura, M. Hori, T. Goto, M. Ito, N. Ishii: "Spatial distribution of absolute CFx radical densities and its formation mechanism in high-density fluorocarbon plasmas using novel system of single-path infrared laser absorption spectroscopy combined wit
M. Nakamura, M. Hori, T. Goto, M. Ito, N. Ishii: "Spatial distribution of absolute CFx radical densities and its formation mechanism in high-density fluorocarbon plasmas using novel system of single-path infrared laser absorption spectroscopy combined wit
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M. Nakamura、M. Hori、T. Goto、M. Ito、N. Ishii：“使用单路红外激光吸收光谱的新型系统结合高密度碳氟化合物等离子体中绝对 CFx 自由基密度的空间分布及其形成机制
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