Spectroscopic studies of nitrogenated amorphous carbon films prepared by ion beam sputtering
Spectroscopic studies of nitrogenated amorphous carbon films prepared by ion beam sputtering
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DOI：
10.1063/1.1459610
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发表时间：
2002-03
影响因子：
3.2
通讯作者：
D. Das;Kuei-Hsien Chen;S. Chattopadhyay;Li‐Chyong Chen
中科院分区：
文献类型：
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作者：
D. Das;Kuei-Hsien Chen;S. Chattopadhyay;Li‐Chyong Chen
用椭偏仪、拉曼散射和X射线光电子能谱(XPS)对离子束溅射制备的非氢化非晶氮化碳(a-CNX)薄膜进行了光谱分析。薄膜的光学带隙是通过Tauc对椭圆偏振光谱测量得到的(n，k)数据的分析来估算的。除了分别在∼1350 cm−1和1550 cm−1处观察到常见的D和G带外，我们在a-CNx薄膜的拉曼光谱中还检测到了∼1450 cm−1处的一个单独的带。这个中间峰被明确地确定为N-N键产生的N带，这是由于氮在a-C网络中的结合。用高分辨率的XPS、C1s和N1s峰估计了薄膜中的氮含量，并从它们的高斯反卷积中识别了不同的成键构型。C1S谱中CN组分和CC组分的强度比I(CN)/I(CC)的增加表明碳网络的氮化作用增强。德..。
Spectroscopic analysis of the unhydrogenated amorphous carbon nitride (a-CNx) films, prepared by ion beam sputtering, was done by ellipsometry, Raman scattering and x-ray photoelectron spectroscopic (XPS) studies. The optical gap of the films was estimated from the Tauc’s analysis of the (n,k) data obtained from spectroscopic ellipsometry. In addition to the commonly observed D and G bands at ∼1350 cm−1 and 1550 cm−1, respectively, we detected a separate band at ∼1450 cm−1 in the Raman spectrum of a-CNx films. This intermediate peak was unambiguously identified as the N band arising out of the nitrogen–nitrogen bonding, due to the incorporation of nitrogen in the a-C network. High resolution XPS C 1s and N 1s peaks were used to estimate the nitrogen content in the films and various bonding configurations were identified from their Gaussian deconvolution. An increase in the intensity ratio of CN and CC components, I(CN)/I(CC), in the C 1s spectra signified increasing nitrogenation of the carbon network. De...