Photonic Microcantilevers With Interferometric Bragg Grating Interrogation
Photonic Microcantilevers With Interferometric Bragg Grating Interrogation
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DOI：
10.1109/jphot.2012.2210396
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发表时间：
2012-10-01
影响因子：
2.4
通讯作者：
Smith, Peter G. R.
中科院分区：
文献类型：
--
作者：
Carpenter, Lewis G.;Holmes, Christopher;Smith, Peter G. R.
锗硅酸盐玻璃微悬臂梁的制造具有集成的法布里-珀罗干涉仪。单模平面波导和布拉格光栅的直接UV写入与物理微加工相结合，使用精密切割锯，在硅平台上实现玻璃微悬臂梁。这里提出的器件具有330 nm/N的波长偏移力灵敏度，其使用表面轮廓仪测量进行校准，并且比当前最先进的基于布拉格光栅的传感器好一个数量级。该设备还显示了一个近似十倍的幅度调制的增加相比，利用一个单一的高斯切趾布拉格光栅的类似的设备架构。通过在最大应变点周围形成法布里-珀罗腔，我们减少了悬臂梁偏转时光栅啁啾的不必要的影响，并将性能与腔相移与偏转相关的机械模型相关联。
Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Perot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Perot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.