Microelectromechanical filters for signal processing
Microelectromechanical filters for signal processing
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DOI：
10.1109/memsys.1992.187722
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发表时间：
1992-02
期刊：
影响因子：
--
通讯作者：
Liwei Lin;C. Nguyen;Roger T. Howe;A. Pisano
中科院分区：
文献类型：
--
作者：
Liwei Lin;C. Nguyen;Roger T. Howe;A. Pisano
演示了基于耦合横向微谐振器的微机电 (MEM) 滤波器。此类 MEM 系统对于需要窄带宽（高 Q）、良好信噪比 (SNR) 以及稳定的温度和老化特性的滤波器具有潜在的信号处理应用。串联和并联滤波器都是使用片外调制技术制造和测试的。对于具有2μm方形横截面的悬梁的多晶硅微结构，这些滤波器的频率范围从大约5kHz到大约1MHz。串联耦合谐振器对设计用于在大气压力下运行，测得的中心频率为 18.7 kHz，带宽为 1.2 kHz。>
Microelectromechanical (MEM) filters based on coupled, lateral microresonators are demonstrated. This class of MEM systems has potential signal-processing applications for filters which require narrow bandwidth (high Q), good signal-to-noise ratio (SNR) and stable temperature and aging characteristics. Both series and parallel filters were fabricated and tested using an off-chip modulation technique. The frequency range of these filters is from approximately 5 kHz to on the order of 1 MHz, for polysilicon microstructures with suspension beams having a 2- mu m-square cross section. A series-coupled resonator pair, designed for operation at atmospheric pressure, has a measured center frequency of 18.7 kHz and a bandwidth of 1.2 kHz.>