Real-time simulations and experiments on ultrahigh frequency surface waves in micro-structured phononic crystals

Real-time simulations and experiments on ultrahigh frequency surface waves in micro-structured phononic crystals
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微结构声子晶体中超高频表面波的实时模拟与实验

DOI:
10.1109/ultsym.2009.5441862
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发表时间:
2009
期刊:
--
影响因子:
--
通讯作者:
Veres I
Veres I
中科院分区:
--
文献类型:
--
作者:
Veres I

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通过实验和数值模拟研究了周期性微结构与高频声表面波的相互作用。我们使用一维(1D)声子晶体的铜线嵌入在氧化硅和二维声子晶体的填充空气的孔蚀刻作为一个正方形晶格在硅基板组成。通过超短脉冲光激励和干涉检测得到的实验结果进行比较,传播的倍频SAW的时域有限元(FEM)模拟的频率分量高达~1 GHz的这些声子晶体,允许调查的SAW散射和声子带结构。模拟结果与实验结果吻合较好。
We investigate experimentally and by numerical simulation the interaction between ultrahigh frequency surface acoustic waves (SAW) and periodic microstructures. We use both one-dimensional (1D) phononic crystals consisting of copper lines embedded in silicon oxide and 2D phononic crystals consisting of air-filled holes etched as a square lattice in a silicon substrate. Experimental results obtained by ultrashort pulsed optical excitation and interferometric detection are compared to time-domain finite element (FEM) simulations of the propagating ultrahigh frequency SAW with frequency components up to ~1 GHz in these phononic crystals, allowing the investigation of SAW scattering and phononic band structure. Good agreement was obtained between simulation and experiment.
DOI: 10.1103/physrevb.80.014301
发表时间: 2009-07-01
期刊: PHYSICAL REVIEW B
影响因子: 3.7
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