Surface ablation of RbTiOPO4 by femtosecond laser
Surface ablation of RbTiOPO4 by femtosecond laser
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DOI：
10.1016/j.optmat.2011.08.007
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发表时间：
2011-11
影响因子：
3.9
通讯作者：
G. R. Kumar;J. Carvajal;M. Pujol;X. Mateos;J. Grau;J. Massons;J. R. V. Aldana;C. Méndez;P. Moreno;L. Roso;J. Ferré‐Borrull;J. Pallarès;L. Marsal;M. Aguiló;F. Díaz
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文献类型：
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作者：
G. R. Kumar;J. Carvajal;M. Pujol;X. Mateos;J. Grau;J. Massons;J. R. V. Aldana;C. Méndez;P. Moreno;L. Roso;J. Ferré‐Borrull;J. Pallarès;L. Marsal;M. Aguiló;F. Díaz
本文报道了用飞秒激光烧蚀RbTiOPO_4单晶的实验结果。我们制作并表征了晶格间距为15 μ m和20μm的一维衍射光栅，并在后者中引入了周期的亚调制。报道了这些衍射光栅的光学和电子显微镜表征以及填充因子分析。我们还表明，通过烧蚀过程中产生的沟槽上的粗糙度可以通过化学蚀刻得到改善。
We report here the results obtained in surface ablation of RbTiOPO4single crystals by femtosecond laser. We fabricated and characterized one-dimensional (1D) diffraction gratings with different lattice spacings of 15 and 20μm, and with a sub-modulation of the period introduced in the later. The optical and electronic microscopy characterization and filling factor analysis of these diffraction gratings are reported. We also show that the roughness generated on the grooves by the ablation process can be improved by chemical etching.