Electron microscopy observation of whiskers and hillocks formed on an Al film deposited on to a glass substrate
Electron microscopy observation of whiskers and hillocks formed on an Al film deposited on to a glass substrate
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DOI：
10.1080/01418610108214303
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发表时间：
2001-02
期刊：
影响因子：
--
通讯作者：
K. Tsujimoto;S. Tsuji;H. Saka
中科院分区：
文献类型：
--
作者：
K. Tsujimoto;S. Tsuji;H. Saka
摘要：用平面透射电镜和横断面透射电镜对沉积在玻璃基板上的铝膜上形成的小丘和晶须进行了表征。晶丘和晶须大多在底晶中间形核，底晶内部位错较少。小丘继承了底部晶粒的取向，而须则没有。提出了一种新的小丘和晶须形成机制，其中表面扩散和杂质增强的晶界扩散起重要作用。
Abstract Hillocks and whiskers formed on an Al film deposited on to a glass substrate have been characterized by plan-view as well as cross-sectional transmission electron microscopy. Most of the hillocks and whiskers were nucleated in the middle of the bottom grains and few dislocations were observed inside the bottom grains. Hillocks inherit the orientations from the bottom grains, while whiskers do not. A new formation mechanism of hillocks and whiskers where surface diffusion and impurity-enhanced grain-boundary diffusion play important roles has been proposed.