Site-Selective Deposition of Ceramic Thin Films Using Self-Assembled Monolayers
Site-Selective Deposition of Ceramic Thin Films Using Self-Assembled Monolayers
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DOI:
10.14852/jcersjsuppl.112.0.s1495.0
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发表时间:
2004
影响因子:
1.1
通讯作者:
Y. Masuda;Yanfeng Gao;P. Zhu;N. Shirahata;N. Saito;K. Koumoto
中科院分区:
文献类型:
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作者:
Y. Masuda;Yanfeng Gao;P. Zhu;N. Shirahata;N. Saito;K. Koumoto