Carbon Contamination in Synchrotron-Radiation-Stimulated Al Deposition Using a Low Temperature Condensed Layer of Dimethyl Aluminum Hydride
Carbon Contamination in Synchrotron-Radiation-Stimulated Al Deposition Using a Low Temperature Condensed Layer of Dimethyl Aluminum Hydride
复制标题
使用二甲基氢化铝低温凝结层的同步辐射刺激铝沉积中的碳污染
DOI：
10.1143/jjap.35.6588
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发表时间：
1996
影响因子：
1.5
通讯作者：
Toshio Ibuki Toshio Ibuki
中科院分区：
文献类型：
--
作者：
Y. Imaizumi;Y. Tsusaka;Tsuneo Urisu Tsuneo Urisu;Toshio Ibuki Toshio Ibuki
利用X射线光电子能谱（XPS）分析比较了非单色同步辐射（SR）和MgK α线（1253.6eV）辐照制备的光化学沉积Al膜中的碳污染。用XPS谱和气相光吸收截面谱研究了二甲基氢化铝低温凝聚层光化学气相沉积Al过程中碳污染的激发能依赖关系，特别是芯电子激发的影响。SR辐照可激发Al 2s和Al 2 p芯电子以及价电子，显著降低了薄膜中的碳污染，而Mg Kα线辐照对碳污染没有影响。这是解释的事实，核心电子激发打破的Al-C键位点特异性。
The carbon contamination in photochemically deposited Al films fabricated using non-monochromatized synchrotron radiation (SR) and Mg Kα line (1253.6 eV) irradiation were compared by X-ray photoelectron spectroscopy (XPS) analysis. The excitation energy dependence of the carbon contamination, especially the effects of core electron excitations, in the photo-CVD of Al using a low-temperature condensed layer of dimethyl aluminum hydride was determined using XPS spectra and gas-phase photo absorption cross section spectra. A significant decrease of the carbon contaminations was observed in the films fabricated using SR irradiation, which can excite Al 2s and Al 2p core electrons as well as the valence electrons, while no change was observed in the films fabricated using Mg Kα line irradiation. This is explained by the fact that core electron excitation breaks the Al–C bonds site-specifically.