Development of a novel force sensor system built with an industrial multilayer ceramic capacitor (MLCC)
Development of a novel force sensor system built with an industrial multilayer ceramic capacitor (MLCC)
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开发采用工业多层陶瓷电容器 (MLCC) 构建的新型力传感器系统
DOI：
10.1109/nems.2012.6196823
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Che
中科院分区：
文献类型：
--
作者：
Keng;C. Chiang;Chih;Che
本文介绍了一种由低成本工业级多层陶瓷电容器(MLCC)构建的新型传感器系统的开发和标准化。MLCC既有力感应元件的作用，又有力维持元件的作用。通过采用这种低成本的MLCC工业部件(一个传感部件不到1美分美元)，可以实现制造高性能力传感器系统的时间和成本。实际上，工业级MLCC是为电容器应用而生产的，而不是用于力测量的传感元件。然而，每个独立的MLCC的灵敏度对于力传感表现出很大的变化(变异系数在0.6左右)。本研究成功地克服了这一缺点，证明了一种简单的极化工艺既能提高MLCC力传感器的灵敏度，又能降低变异系数。结果表明，重新极化处理后，MLCC的变化减小到0.02。对极化电压和极化时间的影响进行了实验研究。结果表明，高极化电场处理的MLCC不仅可以提高灵敏度，而且可以减小力敏的变化。这种再极化处理对于开发一种简单和低成本的基于MLCC的力传感器系统是必不可少的，该系统可以在各种应用中使用。
This paper presents the development and normalization of a novel sensor system built with low-cost industrial-grade multilayer ceramic capacitors (MLCC). MLCCs play both the roles of force sensing elements and force sustaining elements. With adopting this low-cost industrial component of MLCC (less than 1 cent USD for a sensing component), the time and the cost for producing a high performance force sensor system can be achieved. Practically, industrial-grade MLCCs are produced for capacitor applications but not for a sensing element for force measurement. However, the sensitivity for each independent MLCC presents a large variation for force sensing (coefficient of variation around 0.6). This study successfully overcome this drawback, a simple poling process is demonstrated to both increase the sensitivity and to reduce the variation coefficient of MLCC force sensors. Results indicate that the variation for the MLCCs after re-poling treatment is reduced to 0.02. The effects on the poling voltage and poling time are experimentally investigated. Results show that the MLCC treated with a high poling field can increase sensitivity and also reduce the variation for force sensing. This re-poling treatment is essential for developing a simple and low cost MLCC-based force sensor system that can be used in a wide variety of applications.