An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition
An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition
复制标题
升级版超高真空磁控溅射系统，用于多功能性和软件控制的沉积
作者：
A. le Febvrier;L. Landälv;T. Liersch;David Sandmark;P. Sandström;P. Eklund
