High frequency SAW filter on diamond

High frequency SAW filter on diamond
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金刚石高频 SAW 滤波器

DOI:
10.1109/mwsym.1997.602924
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发表时间:
1997
期刊:
1997 IEEE MTT-S International Microwave Symposium Digest
影响因子:
--
通讯作者:
S. Shikata
S. Shikata
中科院分区:
--
文献类型:
--
作者:
K. Higaki;H. Nakahata;H. Kitabayashi;S. Fujii;K. Tanabe;Y. Seki;S. Shikata

文献摘要

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研究了具有很高声表面波速度的金刚石基声表面波(SAW)滤波器。采用频率温度系数为零的SiO/Sub2//ZnO/钻石结构和氧化锌/钻石结构分别制作了2.5 GHz低损耗窄带滤光片和1.5 GHz中频滤光片。氧化锌/金刚石结构的超高功率耐久性在2.9 GHz也得到了证实。金刚石声表面波滤波器具有高速度和高功率耐用性,有望在未来的高频通信系统中得到广泛应用。
Surface acoustic wave (SAW) filters based on diamond which has very high SAW velocity have been investigated. 2.5 GHz low loss narrow-band filter and 1.5 GHz IF filter were demonstrated by the SiO/sub 2//ZnO/diamond structure with zero temperature coefficient of frequency and the ZnO/diamond structure, respectively. The super-high power durability of the ZnO/diamond structure was also confirmed at 2.9 GHz. Diamond SAW filters having high velocity and high power durability, can be expected for broad applications in future high frequency communication systems.