Micromachined W-band filters
Micromachined W-band filters
复制标题
DOI：
10.1109/22.491027
复制
发表时间：
1996-04
影响因子：
4.3
通讯作者：
S. Robertson;L. Katehi;Gabriel M. Rebeiz
中科院分区：
文献类型：
--
作者：
S. Robertson;L. Katehi;Gabriel M. Rebeiz
给出了基于微传感器制造中常见的硅微机械加工技术的高性能平面W波段滤光片的结果。研究了两种微机械平面传输线：微屏蔽线和屏蔽膜微带线。在这两种结构中，导线都悬挂在薄的电介质膜上。这些传输线基本上“漂浮”在空气中，具有可忽略的介电损耗水平，不受辐射和色散的寄生效应的影响。测试了一个90 GHz低通滤波器和几个95 GHz带通滤波器，显示出在共面波导或微带配置中传统衬底支持电路无法达到的优异性能。全波时域有限差分(FDTD)技术验证了W波段电路的测量性能，为薄膜支撑电路和等效衬底支撑电路的性能比较提供了依据。
Results are presented for high performance planar W-band filters based on silicon micromachining techniques common in microsensor fabrication. Two types of micromachined planar transmission lines are studied: microshield line and shielded membrane microstrip (SMM) line. In both of these structures, the conducting lines are suspended on thin dielectric membranes. These transmission lines are essentially "floating" in air, possess negligible levels of dielectric loss, and do not suffer from the parasitic effects of radiation and dispersion. A 90 GHz low pass filter and several 95 GHz bandpass filters are tested and display excellent performance which cannot be achieved with traditional substrate supported circuits in CPW or microstrip configurations. A full-wave finite-difference time-domain (FDTD) technique verifies the measured performance of the W-band circuits and provides a basis for comparison between the performances of membrane supported circuits and equivalent substrate supported circuits.