Langasite for high-temperature bulk acoustic wave applications
Langasite for high-temperature bulk acoustic wave applications
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DOI：
10.1063/1.1345797
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发表时间：
2001-02-12
影响因子：
4
通讯作者：
Tuller, HL
中科院分区：
文献类型：
--
作者：
Fritze, H;Tuller, HL
Langasite （La3Ga5SiO14）及其相关化合物是高温压电材料中很有前途的候选材料。为了确定langasite作为高温体声波（BAW）谐振器的稳定运行，我们对其在高温下的电导率[sigma (el)=1.56xexp(-1.07 eV/kT)S/cm]和氧扩散率[D-ox(T)=5x10(-5) exp(-1.45 eV/kT)cm(2)/ S]进行了表征。Langasite作为BAW谐振器成功地在900°c的温度下工作，平均质量灵敏度约为0.17 μ g Hz(-1) cm（-2）。原则上，这使沉积速率的高温监测和热重测量具有高灵敏度。(C) 2001年美国物理研究所。
Langasite (La3Ga5SiO14) and related compounds are promising candidates for high-temperature piezoelectric applications. To determine the stable operation of langasite as a high-temperature bulk acoustic wave (BAW) resonator, we characterized electrical conductivity [sigma (el)=1.56xexp(-1.07 eV/kT)S/cm] and oxygen diffusivity [D-ox(T)=5x10(-5) exp(-1.45 eV/kT)cm(2)/s] up to elevated temperatures. Langasite was successfully operated up to 900 degreesC as a BAW resonator with an average mass sensitivity of about 0.17 mug Hz(-1) cm(-2). This enables, in principle, high-temperature monitoring of deposition rates and thermogravimetry with high sensitivity. (C) 2001 American Institute of Physics.