On the exploitation of mode localization in surface acoustic wave MEMS
On the exploitation of mode localization in surface acoustic wave MEMS
复制标题
声表面波MEMS中模态局域化的开发
DOI：
10.1016/j.ymssp.2016.07.018
复制
发表时间：
2017
影响因子：
8.4
通讯作者：
Hanley T
中科院分区：
文献类型：
--
作者：
Hanley T
模式局部化感知作为一种替代的共振感知协议最近被引入。与其他谐振方法相比，它显示出了几个优点，特别是具有更高的灵敏度和抑制共模噪声的潜力。阐述了利用声表面波(SAW)制作模式定位传感器的原理。引入了由一对耦合谐振腔组成的广义几何，并求出了腔内位移场的解析解。该解是通过使用光线追踪法耦合内腔解来实现的。将解析解的结果与使用商用有限元软件得到的数值解进行了比较，发现两种解完全一致。从分析模型中获得的洞察力能够确定关键的设计参数。给出了一个简单的分析，显示了与以前的模式定位传感器的例子类似的操作。器件的灵敏度与耦合两个腔的阵列中的周期数呈非线性关系。
Mode localization sensing has been recently introduced as an alternative resonant sensing protocol. It has been shown to exhibit several advantages over other resonant methods, in particular a potential for higher sensitivity and rejection of common mode noise. This paper expounds the principles of utilising surface acoustic waves (SAW) to create a mode localization sensor. A generalised geometry consisting of a pair of coupled resonant cavities is introduced and an analytical solution found for the displacement fields within the cavities. The solution is achieved by coupling the internal cavity solutions using a ray tracing method. The results of the analytical solution are compared to a numerical solution found using commercial finite element method (FEM) software; exact agreement is found between the two solutions. The insight gained from the analytical model enables the determination of critical design parameters. A brief analysis is presented showing analogous operation to previous examples of mode localization sensors. The sensitivity of the device is shown to depend nonlinearly on the number of periods in the array coupling the two cavities.