4H-SiC Layers Grown by Liquid Phase Epitaxy on 4H-SiC Off-Axis Substrates
4H-SiC Layers Grown by Liquid Phase Epitaxy on 4H-SiC Off-Axis Substrates
复制标题
在 4H-SiC 离轴衬底上通过液相外延生长的 4H-SiC 层
DOI:
10.4028/www.scientific.net/msf.338-342.229
复制
发表时间:
2000
期刊:
影响因子:
--
通讯作者:
György Vida
中科院分区:
文献类型:
--
作者:
N. Kuznetsov;A. Morozov;D. Bauman;V. Ivantsov;V. A. Sukhoveyev;I. Nikitina;A. Zubrilov;S. Rendakova;V. Dmitriev;D. Hofman;György Vida