T.Kamiya,K.Ro,C.M.Fortmann,I.Simizu: "Role of Seed Crystal Layer in Two-Step-Growth Procedure for Low Temperature Growth of Polycrystallin Silicon Thin Film from SiF4 by a Remote-Type"Jpn. J. Appl. Phys.. 38. 5762-5767 (1999)
T.Kamiya,K.Ro,C.M.Fortmann,I.Simizu: "Role of Seed Crystal Layer in Two-Step-Growth Procedure for Low Temperature Growth of Polycrystallin Silicon Thin Film from SiF4 by a Remote-Type"Jpn. J. Appl. Phys.. 38. 5762-5767 (1999)
复制标题
T.Kamiya,K.Ro,C.M.Fortmann,I.Simizu:“籽晶层在远程型 SiF4 多晶硅薄膜低温生长的两步生长过程中的作用”Jpn。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: