Low frictional property of copper oxide thin films optimised using a combinatorial sputter coating system
Low frictional property of copper oxide thin films optimised using a combinatorial sputter coating system
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DOI：
10.1016/j.apsusc.2005.03.236
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发表时间：
2006-01-31
影响因子：
6.7
通讯作者：
Tosa, M
中科院分区：
文献类型：
--
作者：
Goto, M;Kasahara, A;Tosa, M
开发了一种组合溅射镀膜系统，可以优化镀膜的晶体择优取向。利用该系统，可以在精确控制诸如溅射气体、气压、气体分压、r.f.通过改变功率、衬底温度、衬底与靶材之间的距离等因素，成功地合成了具有不同晶体择优取向的氧化铜涂层，并通过优化晶体择优取向获得了低摩擦性能。(c)2005 Elsevier B.V.保留所有权利。
A combinatorial sputter coating system has been developed that can optimize the crystal preferred orientation of coating films. With this system, it is possible to synthesize various kinds of coatings whilst precisely controlling conditions such as the sputter gas, the gas pressure, the gas partial pressure, the r.f. power, the substrate temperature, the distance between the substrate and target, etc. In this way, we successfully synthesized copper oxide coatings with different crystal preferred orientations, and low frictional property was obtained by optimizing the crystal preferred orientation. (c) 2005 Elsevier B.V. All rights reserved.