MEMS Actuators for Optical Microendoscopy
MEMS Actuators for Optical Microendoscopy
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DOI：
10.3390/mi10020085
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发表时间：
2019-01
期刊：
影响因子：
3.4
通讯作者：
Z. Qiu;W. Piyawattanametha
中科院分区：
文献类型：
--
作者：
Z. Qiu;W. Piyawattanametha
对负担得起的、便携的和可靠的光学显微内窥镜成像设备的日益增长的需求吸引了研究机构和行业寻找新的制造方法。然而，将微观组件集成到这些子系统中是当今制造和包装领域的挑战之一。与这种小型化一起，越来越多的功能部件必须被容纳在越来越小的空间中。因此，利用微电子机械系统(MEMS)制造技术来解决这一挑战，为实现各种新型光学显微内窥镜的微型化开辟了广阔的前景。MEMS制造技术使得能够以高精度应用批量制造方法，并将各种光学功能包括到光学元件中。因此，MEMS技术使得更容易获得先进的光学显微内窥镜技术，以提供与传统桌面显微镜相匹配的高分辨率和高性能成像。本文将详细介绍用于光学显微内窥镜检查的MEMS驱动器的最新进展。
Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail.