Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil
Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil
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DOI：
10.1016/s0042-207x(99)00177-3
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发表时间：
2000-02
期刊：
影响因子：
4
通讯作者：
C. Engström;T. Berlind;J. Birch;L. Hultman;I. Ivanov;S. Kirkpatrick;S. Rohde
中科院分区：
文献类型：
--
作者：
C. Engström;T. Berlind;J. Birch;L. Hultman;I. Ivanov;S. Kirkpatrick;S. Rohde
