A fine tool servo system for global position error compensation for a miniature ultra-precision lathe
A fine tool servo system for global position error compensation for a miniature ultra-precision lathe
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DOI：
10.1016/j.ijmachtools.2006.08.023
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发表时间：
2007-06-01
影响因子：
14
通讯作者：
Watt, Frank
中科院分区：
文献类型：
--
作者：
Sze-Wei, Gan;Han-Seok, Lim;Watt, Frank
对单点钻石转向制造微分组件以及大型工件表面上的微功能的需求不断增加。为了获得高精度和大面积工件的精细表面饰面，机床的位置控制已成为实现高精度位置控制的主要问题。粗细的伺服系统能够提供具有成本效益的解决方案。该系统可以提供有关整个指南错误数据的信息，并通过使用良好的位置控制技术同时补偿错误。在这项研究中，已经开发了一个基于压电执行器的精细工具伺服系统（FTS）系统，并已与微型超精确车床合并。 FTS设计集成了成本效益的位置灵敏度检测器（PSD），该设计能够准确地测量翻译幻灯片的全局直率误差。检测到的误差信号在转弯过程中由FTS补偿。为了更好地跟踪性能，在本研究中已经实施和测试了比例综合（PI）的反馈控制器。实验结果表明，开发的FTS可以有效，成功地补偿由微型超精确车床的X轴翻译载玻片引起的微波状误差。 （c）2006 Elsevier Ltd.保留所有权利。
There is an increasing demand for single-point diamond turning to manufacture micro components as well as micro features on a large workpiece surface. In order to obtain high accuracy and a fine surface finish of the large area workpiece, position control of machine tool has become the main concern to achieve the high precision position control. A coarse-fine servo system is able to provide a cost-effective solution. This system can provide information on the entire guidance errors profile data and simultaneously compensate the error in real-time by using the fine position control technique. In this study, a piezoelectric actuator based fine tool servo (FTS) system has been developed and it has been incorporated with a miniature ultra-precision lathe. A cost-effective position sensitivity detector (PSD) is integrated in the FTS design, which is able to measure the global straightness error of the translational slide accurately. The detected error signals are compensated by the FTS during the turning process. For better tracking performance, a proportional-integral (PI) feedback controller has been implemented and tested in this study. Experimental results show that the developed FTS can effectively and successfully compensate the micro waviness error which is caused by the x-axis translational slide of the miniature ultra-precision lathe. (c) 2006 Elsevier Ltd. All rights reserved.