Implementation of in Process Surface Metrology for R2R Flexible PV Barrier Films
Implementation of in Process Surface Metrology for R2R Flexible PV Barrier Films
复制标题
R2R 柔性光伏阻隔膜的过程中表面测量的实施
DOI：
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复制
发表时间：
2015
影响因子：
1.1
通讯作者：
L. Fleming
中科院分区：
文献类型：
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作者：
M. Elrawemi;L. Blunt;H. Muhamedsalih;F. Gao;L. Fleming
特别用于光伏（PV）模块中以防止水蒸气进入的可能性的氧化铝（Al2O3）的薄功能性阻挡层应无任何缺陷地施加在整个PV表面上。然而，对于阻挡层厚度，
在亚微米范围内（高达50 nm）
通过原子层沉积（ALD）方法生产的半导体器件，在生产过程中通常会出现缺陷。为了避免有缺陷的屏障被纳入最终的PV单元中，需要在屏障生产过程中检测缺陷。
本文介绍了一种能够在500 mm势垒宽度上检测横向尺寸为3 μm、纵向分辨率为10 nm的表面缺陷（如针孔、划痕或颗粒）的在线检测系统的实现。该系统具有内置的环境振动补偿功能，可以监控使用卷对卷（R2R）技术制造的ALD涂层薄膜。最后，借助该在线测量系统，可以监控大面积基材的涂层表面工艺，并在必要时对工艺参数进行修正。
Thin functional barrier layers of aluminum oxide (Al2O3) that are used particularly in photovoltaic (PV) modules to prevent the possibility of water vapor ingress should be applied over the entire PV surface without any defects. However, for barrier layer thicknesses
within the sub-micrometer range (up to 50 nm)
produced through the atomic layer deposition (ALD) method, it is common for defects to occur during the production process. To avoid defective barriers from being incorporated in the final PV unit, defects need to be detected during the barrier production process.
In this paper, the implementation of in process inspection system capable of detecting surface defects such as pinholes, scratches, or particles down to a lateral size of 3 μm and a vertical resolution of 10 nm over a 500 mm barrier width is presented. The system has a built-in environmental vibration compensation capability, and can monitor ALD-coated films manufactured using roll-to-roll (R2R) techniques. Ultimately, with the aid of this in process measurement system, it should be possible to monitor the coating surface process of large-area substrates, and if necessary, carry out remedial work on the process parameters.