Laser Induced Plasma Micro-Machining
Laser Induced Plasma Micro-Machining
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DOI：
10.1115/msec2010-34242
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
K. Pallav;K. Ehmann
中科院分区：
文献类型：
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作者：
K. Pallav;K. Ehmann
为了克服与微放电加工 (μ-EDM) 工艺相关的各种限制，引入了一种新的微加工工艺。 µ-EDM 的局限性主要是由于导电电极和工件的要求、刀具磨损以及复杂的磨损补偿策略。这种新工艺被称为“激光诱导等离子体微加工”，使用激光束在工件表面附近的电介质中产生等离子体，其爆炸性膨胀导致材料去除，其机制类似于 μ-EDM 中发生的机制。版权所有 © 2010 ASME
A new micro-machining process that is motivated by the need to overcome the various limitations associated with the micro-EDM (μ-EDM) process is introduced. The limitations in μ-EDM are primarily due to the requirement of a conductive electrode and workpiece, tool wear, and complex wear compensation strategies. The new process, termed “laser-induced plasma micro-machining” uses a laser beam to generate plasma in a dielectric near the workpiece surface whose explosive expansion results in material removal by mechanisms similar to those that occur in μ-EDM.Copyright © 2010 by ASME