Native Oxide Removal from InAlN Surfaces by Hydrofluoric Acid Based Treatment
Native Oxide Removal from InAlN Surfaces by Hydrofluoric Acid Based Treatment
复制标题
通过氢氟酸处理去除 InAlN 表面的自然氧化物
DOI:
10.1587/transele.e96.c.686
复制
发表时间:
2013
影响因子:
0.5
通讯作者:
T. Nakano and M. Akazawa
中科院分区:
文献类型:
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作者:
飯田和貴;横田裕樹;夫恒範;金大貴;T. Nakano and M. Akazawa