Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images

Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images
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基于直方图的自动分割:一种从 SEM 图像分割集成电路结构的新方法

DOI:
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发表时间:
2020
期刊:
arXiv.org
影响因子:
--
通讯作者:
D. Woodard
D. Woodard
中科院分区:
--
文献类型:
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作者:
Ronald Wilson;Navid Asadizanjani;Domenic Forte;D. Woodard

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在逆向工程和硬件保证领域,大部分数据采集是通过扫描电子显微镜(SEM)等电子显微镜技术完成的。然而,与光学成像不同,只有有限数量的技术可用于增强和从原始扫描电镜图像中提取信息。本文介绍了一种从扫描电镜图像中分割出集成电路结构的算法。与本文讨论的现有算法不同,该算法是无监督的,无参数的,并且不需要目标图像中的噪声模型或特征的先验信息,因此在低质量图像采集场景中也是有效的。此外,还报道和讨论了该算法在集成电路中各种结构和层的应用结果。
In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging, only a limited number of techniques are available to enhance and extract information from the raw SEM images. In this paper, we introduce an algorithm to segment out Integrated Circuit (IC) structures from the SEM image. Unlike existing algorithms discussed in this paper, this algorithm is unsupervised, parameter-free and does not require prior information on the noise model or features in the target image making it effective in low quality image acquisition scenarios as well. Furthermore, the results from the application of the algorithm on various structures and layers in the IC are reported and discussed.
使用物理检查和高级图像处理检测由不受信任的代工厂插入的硬件木马
DOI: 10.1007/s41635-018-0055-0
发表时间: 2018
期刊: Journal of Hardware and Systems Security
影响因子: --
作者:
Vashistha, Nidish;Rahman, M. Tanjidur;Shen, Haoting;Woodard, Damon L.;Asadizanjani, Navid;Tehranipoor, Mark
通讯作者: Tehranipoor, Mark