Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images
Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images
复制标题
基于直方图的自动分割:一种从 SEM 图像分割集成电路结构的新方法
DOI:
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发表时间:
2020
期刊:
影响因子:
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通讯作者:
D. Woodard
中科院分区:
文献类型:
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作者:
Ronald Wilson;Navid Asadizanjani;Domenic Forte;D. Woodard
In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging, only a limited number of techniques are available to enhance and extract information from the raw SEM images. In this paper, we introduce an algorithm to segment out Integrated Circuit (IC) structures from the SEM image. Unlike existing algorithms discussed in this paper, this algorithm is unsupervised, parameter-free and does not require prior information on the noise model or features in the target image making it effective in low quality image acquisition scenarios as well. Furthermore, the results from the application of the algorithm on various structures and layers in the IC are reported and discussed.
DOI:
10.1007/s41635-018-0055-0
发表时间:
2018
期刊:
Journal of Hardware and Systems Security
影响因子:
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作者:
Vashistha, Nidish;Rahman, M. Tanjidur;Shen, Haoting;Woodard, Damon L.;Asadizanjani, Navid;Tehranipoor, Mark
通讯作者:
Tehranipoor, Mark