K. Yoshida, M. Kikuchi, J.-H. Park and S. Yokota: "A micro ER valve fabricated by micromachining"The 14th IEEE International Conference on Micro Electro Mechanical Systems. 467-470 (2001)

K. Yoshida, M. Kikuchi, J.-H. Park and S. Yokota: "A micro ER valve fabricated by micromachining"The 14th IEEE International Conference on Micro Electro Mechanical Systems. 467-470 (2001)
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K.吉田,M.菊地,J.-H。

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