Kazunori Maruyama, Kiichiro Kamata, Masaki Yamamoto, Toshiyuki Morinaga and Kozo Kuchitsu: "Formation of Carbon Film from C_2H_2-H_2 by ECR Plasma CVD by Application of a Negative DC Bias" Bulletin of Chemical Society of Japan. 66. 975-977 (1993)
Kazunori Maruyama, Kiichiro Kamata, Masaki Yamamoto, Toshiyuki Morinaga and Kozo Kuchitsu: "Formation of Carbon Film from C_2H_2-H_2 by ECR Plasma CVD by Application of a Negative DC Bias" Bulletin of Chemical Society of Japan. 66. 975-977 (1993)
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Kazunori Maruyama、Kiichiro Kamata、Masaki Yamamoto、Toshiyuki Morinaga 和 Kozo Kuchitsu:“通过应用负直流偏压通过 ECR 等离子体 CVD 从 C_2H_2-H_2 形成碳膜”日本化学会会刊。
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