An electrochemical micro actuator
An electrochemical micro actuator
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电化学微型执行器
DOI：
10.1109/memsys.1995.472545
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
M. Elwenspoek
中科院分区：
文献类型：
--
作者：
M. Hamberg;C. Neagu;J. Gardeniers;D. J. Ijntema;M. Elwenspoek
本文对新型电化学微执行器的可行性进行了研究。该执行器采用硅微加工技术制造。通过电解质水溶液的电解产生气压。建立的压力用于改变膜的偏转。执行器具有三种状态： 电解状态，压力建立；被动状态，其中电路打开并且压力保持；以及减压状态，其中电极被短路以降低压力。这种驱动类型的优点是能耗低。在压力建立和改变状态期间需要电力。
In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.