Interaction between electric field and plasma in inductively coupled discharges

Interaction between electric field and plasma in inductively coupled discharges
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DOI:
10.1063/5.0108859
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发表时间:
2022
期刊:
影响因子:
1.6
通讯作者:
Taotao Zhou
Taotao Zhou
中科院分区:
材料科学4区
文献类型:
--
作者:
Jun Tao;Nong Xiang;Yemin Hu;Yueheng Huang;Chunyun Gan;Taotao Zhou

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