New Fabrication Method of Channel Optical Waveguides of Organic Crystal Using an Inorganic Photoresist
New Fabrication Method of Channel Optical Waveguides of Organic Crystal Using an Inorganic Photoresist
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利用无机光刻胶制备有机晶体通道光波导的新方法
DOI：
10.1143/jjap.31.l134
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发表时间：
1992
影响因子：
1.5
通讯作者：
Ryoichi Ito Ryoichi Ito
中科院分区：
文献类型：
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作者：
Keiji Tsuda;T. Kondo;F. Saito;T. Kudo;Ryoichi Ito Ryoichi Ito
本文介绍了一种适用于有机晶体光波导的微光刻技术。新技术包括使用水溶性无机光致抗蚀剂，然后进行湿法或干法蚀刻。由于该方法不含有机溶剂，不需要高温烘烤，因此适用于各种有机晶体。
A microlithographic technique applicable to optical waveguides made of organic crystals is described. The new technique consists in the use of a water-soluble inorganic photoresist followed by wet or dry etching. Since the process is organic-solvent free and does not require high-temperature baking, it should be applicable to a wide range of organic crystals.