A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities - Part II: Fabrication and characterization
A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities - Part II: Fabrication and characterization
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DOI：
10.1109/jmems.2005.844762
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发表时间：
2005-06-01
影响因子：
2.7
通讯作者：
Kurabayashi, K
中科院分区：
文献类型：
--
作者：
Tung, YC;Kurabayashi, K
本文报道了一种新型静电微致动器的制作和特性，该微致动器可以在单硅器件层上实现面外多轴运动。通过结合三维聚二甲基硅氧烷（PDMS）微观结构，简单的驱动器设计可以实现多轴运动。本文提出了一种新的器件加工方法“软光刻升降接枝（SLLOG）”来制造先前设计的PDMS-on-silicon混合驱动器结构。SLLOG是一种低温（低于150摄氏度）工艺，允许复制模制PDMS微结构集成在硅微机械器件模式中。采用激光振动仪对所制备的驱动器进行了表征。实验结果表明，驱动运动在三个独立的轴上实现，动态响应速度快，带宽约为5 kHz。制造的pdms -on-硅致动器在40 v的峰对峰交流驱动电压下可产生高达5 μ m的垂直位移和0.6度的旋转倾角。
This paper reports on fabrication and characterization of a new electrostatic microactuator that achieves out-of-plane multi-axis motion with a single silicon device layer. The multi-axis motion with the simple actuator design is possible by incorporating a three-dimensional (3-D) polydimethylsiloxane (PDMS) microstructure. This paper develops a new device processing method named "Soft-Lithographic Lift-Off and Grafting (SLLOG)" to fabricate the previously designed PDMS-on-silicon hybrid actuator structure. SLLOG is a low-temperature (less than 150 degrees C) process that allows replica molded PDMS microstructures to be integrated in silicon micromachined device patterns. The fabricated actuator is characterized using laser vibrometry. The experimental results demonstrate actuation motions achieved in three independent axes with fast dynamic response reaching a bandwidth of about 5 kHz. The fabricated PDMS-on-silicon actuator yields a vertical displacement up to 5 mu m and rotational motions with a 0.6-degrees tilting angle at a 40-V peak-to-peak ac actuation voltage.