The modulation on luminescence of Er3+-doped silicon-rich oxide films by the structure evolution of silicon nanoclusters.
The modulation on luminescence of Er3+-doped silicon-rich oxide films by the structure evolution of silicon nanoclusters.
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硅纳米团簇结构演化对Er3掺杂富硅氧化物薄膜发光的调制
DOI：
10.1186/1556-276x-8-34
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发表时间：
2013-01-18
影响因子：
--
通讯作者：
Que D
中科院分区：
文献类型：
--
作者：
Jin L;Li D;Xiang L;Wang F;Yang D;Que D
采用溅射后退火法制备了一系列嵌入结构可调硅纳米团簇（Si NCs）的富硅氧化物（SRO）和掺铒SRO （SROEr）薄膜。在硅过量的薄膜中发现了硅纳米管的聚结现象。Si NCs和Er3+之间的能量传递速率提高，但聚结的微观结构降低了Si NCs和Er3+的发光效率。对纳米硅的微观结构进行了优化，当纳米硅在微观结构中分离时，可以实现纳米硅和Er3+的优先光学性能。
A series of silicon-rich oxide (SRO) and erbium-doped SRO (SROEr) films imbedded with structural tunable silicon nanoclusters (Si NCs) have been fabricated using sputtering followed by post-annealing. The coalescence of Si NCs is found in the films with large Si excess. The energy transfer rate between Si NCs and Er3+is enhanced, but the luminescence efficiencies of both Si NCs and Er3+are reduced by the coalescent microstructures. Optimization of the microstructures of Si NCs is performed, and the preferential optical performance for both Si NCs and Er3+could be achieved when Si NCs were separated in microstructures.