Evaluation of figure accuracy of Wolter mirror fabricated by electroforming
Evaluation of figure accuracy of Wolter mirror fabricated by electroforming
复制标题
电铸沃尔特镜形状精度评价
DOI：
10.1117/12.2243422
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
H. Motoyama and H. Mimura
中科院分区：
文献类型：
--
作者：
S. Egawa;T. Kume;Y. Takeo;Y. Takei;H. Motoyama and H. Mimura
Wolter反射镜以其优良的特性成为软X射线显微成像的重要器件。其环形孔径可实现高NA设计，同时保持高光子传输效率。然而，其深而窄的圆柱状形状使其制造困难。尽管历史悠久，但Wolter镜实际上并没有用于高分辨率显微镜。我们一直在发展一种具有旋转对称形状的掠入射反射镜的制造工艺。镜子是用精密加工的心轴复制的。我们采用电铸作为复制方法，具有高复制精度和再现性。在这里，我们报告的第一个制造沃尔特镜和讨论复制质量电铸。利用可见光显微镜进行了观察实验，评价了Wolter镜的成像质量。
The Wolter mirror is a promising imaging device for soft x-ray microscopy owing to its excellent characteristics. Its annular aperture enables high-NA design while maintaining high photon transfer efficiency. However, its deep and narrow cylinder-like shape makes its fabrication difficult. Despite its long history, the Wolter mirror has not been practically used for high-resolution microscopy. We have been developing a fabrication process for grazing incidence mirrors with rotationally symmetric shapes. The mirrors are replicated from precisely machined mandrels. We employ electroforming as a replication method with high replication accuracy and reproductivity. Here, we report the first fabrication of a Wolter mirror and discuss the replication quality in electroforming. The imaging quality of Wolter mirror is also evaluated in an observation experiment using a visible-light microscope.