Electrical Patterning System Utilizing On-Demand Micro-Plasma-Bubbles
Electrical Patterning System Utilizing On-Demand Micro-Plasma-Bubbles
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DOI：
10.1109/transducers50396.2021.9495448
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发表时间：
2021-06
期刊：
影响因子：
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通讯作者：
Y. Yamashita;Natsumi Basaki;S. Sakuma;Y. Yamanishi
中科院分区：
文献类型：
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作者：
Y. Yamashita;Natsumi Basaki;S. Sakuma;Y. Yamanishi
我们已经提出了利用按需微等离子体气泡的电图案化系统，其适用于各种衬底，例如干/湿和导电/非导电材料。本文研究了产生微等离子体气泡的脉冲条件，发现产生气泡的三种模式：单脉冲单气泡（SPSB）、多脉冲单气泡（MPSB）和全脉冲单气泡（APSB）模式。接下来，我们确认脉冲间隔也是绘制电气图案的关键参数。最后，我们证明了使用构建的系统在玻璃基板上的电图案化。
We have proposed electrical patterning system utilizing on-demand micro-plasma-bubbles that is applicable to the various substrates such as dry/wet and conductive/non-conductive materials. In this study, we investigated the pulse conditions for generating micro-plasma-bubbles, and found that three modes of bubble generation: single-pulse to single-bubble (SPSB), multi-pulses to single bubble (MPSB), and all-pulses to single bubble (APSB) modes. Next, we confirmed that the pulse interval was also critical parameters for drawing the electrical pattern. Finally, we demonstrated electrical patterning on a glass substrate using the constructed system.