Adhesion and thermal stability enhancement of IZO films by adding a primer layer on polycarbonate substrate
Adhesion and thermal stability enhancement of IZO films by adding a primer layer on polycarbonate substrate
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DOI：
10.1002/pssa.201431685
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发表时间：
2015-04
期刊：
影响因子：
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通讯作者：
Xuan Zhang;Xiaofeng Zhang;Yue Yan;Yanli Zhong;Lei Li;Guanli Zhang
中科院分区：
文献类型：
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作者：
Xuan Zhang;Xiaofeng Zhang;Yue Yan;Yanli Zhong;Lei Li;Guanli Zhang
为了提高聚碳酸酯（PC）上非晶透明氧化铟锌（IZO）薄膜的附着力和热稳定性，开发了一种有机硅基底漆层。在室温下通过直流磁控溅射在底漆处理和未处理的PC上沉积的IZO膜在120 °C下在空气中退火期间的表面形态、粘附性、光学和电学性质方面进行了非原位评估。纳米划痕测试表明，IZO膜在底漆处理过的基材上的附着力优于在未处理的PC上的附着力，该附着力为上级。这种上级粘附性可归因于底漆层中丰富的强Si-O-Si无机键以及底漆层在热膨胀方面与IZO的更好匹配。此外，在退火处理过程中，在底漆处理过的PC上制备的IZO薄膜的电阻率保持稳定，而在未处理过的PC上制备的IZO薄膜的电阻率则呈现持续增加的趋势，这归因于氧吸附导致的载流子浓度降低。
A silicone‐based primer layer was developed to improve the adhesion and thermal stability of amorphous transparent indium zinc oxide (IZO) films on polycarbonate (PC). The IZO films deposited by direct current magnetron sputtering at room temperature on primer‐treated and untreated PCs were evaluated ex situ in terms of surface morphology, adhesion, optical, and electrical properties during annealing at 120 °C in air. Nano‐scratch tests indicated the adhesion of IZO films on primer‐treated substrates was superior to that on untreated PCs. This superior adhesion can be attributed to the strong Si‐O‐Si inorganic bonds abundant in the primer layer and better matches of the primer layer in the terms of thermal expansion to the IZO. Moreover, the electrical resistivity of IZO films prepared on primer‐treated PCs remained stable during the annealing treatment, whereas those of IZO films on untreated PCs presented a continuously increasing trend, which was attributed to the decrease in carrier concentration that resulted from oxygen adsorption.