Development of net-shape piezoelectric actuators for large x-ray optics
Development of net-shape piezoelectric actuators for large x-ray optics
复制标题
用于大型 X 射线光学器件的净形压电执行器的开发
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Andy D. Smith
中科院分区：
文献类型：
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作者：
D. Rodriguez Sanmartin;Dou Zhang;T. Button;C. Meggs;C. Atkins;P. Doel;D. Brooks;C. Feldman;R. Willingale;A. James;G. Willis;Andy D. Smith
当前X射线望远镜系统的设计需要在分辨率和灵敏度之间达成折衷。自适应光学的一个新领域是发展主动控制的薄X射线反射镜，其中像差将被校正。它们在X射线望远镜上的组装将提供一种具有高分辨率和高灵敏度的仪器。智能X射线光学（SXO）项目包括一个英国-为下一代X射线望远镜开发原型的财团。总体目标是使用薄的、小于1 mm的结构来生产X射线镜，该结构包括具有结合的压电单晶致动器的Ni镜壳，并且具有约0.1弧的目标分辨率。这样的光学系统将使X射线望远镜的设计具有更大的分辨率和集体面积，分别比钱德拉（0.5弧）和XMM牛顿（1650平方厘米）目前最好的。锆钛酸铅PZT基压电致动器正在开发中，以精确地适应弯曲镍镜壳原型（100×300×0.4mm，曲率半径167 mm）。采用粘塑性加工工艺，制作了75×32×0.18mm的网状压电单晶驱动器，驱动器的曲率半径与X射线光学元件的曲率半径一致。激光加工已被用于精确控制致动器的形状和多段电极的定义。精确控制厚度、表面光洁度和曲率是提供令人满意的致动器的关键因素。结果提出有关的压电致动器的制造和表征，和镍光学上的集成程序。
The design of current X-ray telescope systems needs to reach a compromise between the resolution and sensitivity. A new area of interest of adaptive optics is the development of actively controlled thin X-ray mirrors, where aberrations would be corrected. Their assembly on an X-ray telescope would provide an instrument with both high resolution and sensitivity. The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing prototypes for the next generation of X-ray telescopes. The overall aim is to produce X-ray mirrors using thin, below 1mm, structures, comprising Ni mirror shells with bonded piezoelectric unimorph actuators, and with a target resolution of ~0.1 arcs. Such an optic would enable the design of an X-ray telescope with both a greater resolution and collective area than the best currently available by Chandra (0.5arcs) and XMM Newton (1650cm2) respectively. Lead zirconate titanate, PZT-based piezoelectric actuators are being developed in this programme to fit precisely the curved Ni mirror shell prototypes (100×300×0.4mm, radius of curvature 167mm). Viscous plastic processing has been chosen for the fabrication of net-shaped piezoelectric unimorph actuators 75×32×0.18mm, with radius of curvature conforming to those of the X-ray optic. Laser machining has been used for precisely controlling the actuator shape and for the definition of the multi-segment electrodes. Accurate control of the thickness, surface finish and curvature are the key factors to delivering satisfactory actuators. Results are presented concerning the fabrication and characterisation of the piezoelectric actuators, and the integration procedure on the nickel optic.