Optically modulated MEMS scanning endoscope

Optically modulated MEMS scanning endoscope
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DOI:
10.1109/lpt.2005.860050
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发表时间:
2006-01-01
影响因子:
2.6
通讯作者:
Toshiyoshi, H
Toshiyoshi, H
中科院分区:
工程技术3区
文献类型:
--
作者:
Chong, CH;Isamoto, K;Toshiyoshi, H

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这封信提出了一种新的配置的微机电系统(MEMS)扫描内窥镜,是由外部光调制驱动。使用波长在1550 nm范围内的光来调制扫描MEMS镜。该仪器还提供波长为1310 nm的第二光束的传输,通常用于医学诊断应用,如光学相干断层扫描。这两个波长使用波分复用滤波器组合并发射到单模光纤中。这种新颖的方法提供了扫描内窥镜的操作,而不需要直接对扫描元件供电。以这种方式,用于体内诊断的危险性较小的设备是可能的。讨论了模块和MEMS扫描镜的设计。一个制造的模块,其中的MEMS反射镜扫描在350 Hz的谐振频率,产生8度的光学扫描角。
This letter presents a novel configuration of a microelectrical-mechanical system (MEMS) scanning endoscope that is actuated by external optical modulation. Light at a wavelength in the 1550-nm range is used to modulate a scanning MEMS mirror. The instrument also provides for the delivery of a second beam at a wavelength of 1310 nm, commonly used for medical diagnostic applications such as optical coherence tomography. The two wavelengths are combined with using a wavelength-division-multiplexing filter and launched into a single-mode fiber. This novel approach provides for the operation of a scanning endoscope without the need for directly powering up the scanning element. In this way a less hazardous apparatus for in vivo diagnosis is possible. The design of the module and MEMS scanning mirror is discussed. A fabricated module is demonstrated in which a MEMS mirror scans at the resonant frequency of 350 Hz, generating an optical scanning angle of 8 degrees.