One-shot surface profile measurement using polarized phase-shifting
One-shot surface profile measurement using polarized phase-shifting
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DOI：
10.1117/12.836308
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发表时间：
2009-11
期刊：
影响因子：
--
通讯作者：
Yuanjiang Chen;Yifang Du
中科院分区：
文献类型：
--
作者：
Yuanjiang Chen;Yifang Du
An instantaneous polarized phase-shifting interferometer (IPSI) with an optical image combiner is designed to form a one-shot surface profile measurement system. The interference images are captured simultaneously by using one CCD camera. Digital image correlation (DIC) method is applied effectively to correct the position mismatch among the images. Test of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.07μm~0.09μm can be achieved, and the maximum error is about 0.2μm.
