Design and analysis of non-uniform shaped RF MEMS switch
Design and analysis of non-uniform shaped RF MEMS switch
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DOI：
10.1007/s10825-014-0566-z
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发表时间：
2014-06
影响因子：
2.1
通讯作者：
Vaibhav Kolte;P. Mahajan
中科院分区：
文献类型：
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作者：
Vaibhav Kolte;P. Mahajan
本文提出了一种新型的非均匀悬臂梁直流接触式射频微机电系统（RF MEMS）开关。这种开关可以用于各种无线移动的应用在DC-10 GHz的频率范围内，因为它具有良好的RF特性与低致动电压。从开关梁厚度、梁间隙、弹簧形状和材料等方面对静电驱动机制进行了优化设计。此外，它的优化形状和尺寸的接触几何形状和材料，确保高可靠性，高隔离和非常低的插入损耗。该开关的主要特点是结构简单、接触可靠、射频特性好、启动电压低和优良的品质因数。我们研究了所提出的设计与Coventorware软件的机电和电磁分析，得到了非常有前途的结果。本文简要介绍了RF MEMS开关的设计，并重点分析了各种开关参数。
In this paper, we present a novel non-uniform shaped cantilever based DC contact radio frequency microelectromechanical systems (RF MEMS) switch. This switch can be employed for various wireless mobile applications in frequency range of DC-10 GHz as it shows excellent RF characteristics with low actuation voltage. The design is optimized in the terms of electrostatic actuation mechanism, which included switch beam thickness, beam gap, spring shape and materials. Also, it’s optimized shape and size of contact geometry and material ensures the high reliability, high isolation and very low insertion loss. The main features of this switch are simplicity of structure, reliability of contact, excellent RF characteristics, low actuation voltage and excellent figure of merit. We investigate the proposed design with Coventorware software for electromechanical and electromagnetic analysis and, get very promising results. The paper briefly outlines the design of RF MEMS switch and also focuses on the analysis of various switching parameters.