Wideband Multimode Transducer Consisting of c-Axis Tilted ZnO/c-Axis Normal ZnO Multilayer
Wideband Multimode Transducer Consisting of c-Axis Tilted ZnO/c-Axis Normal ZnO Multilayer
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DOI：
10.1143/jjap.51.07gc08
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发表时间：
2012-07
影响因子：
1.5
通讯作者：
S. Takayanagi;T. Yanagitani;M. Matsukawa
中科院分区：
文献类型：
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作者：
S. Takayanagi;T. Yanagitani;M. Matsukawa
宽带超声换能器是声成像和无损评价的必需品。在本研究中，我们在Au（111）/Ti/SiO2玻璃衬底上制作了c轴倾斜ZnO/c轴垂直ZnO多层膜换能器。我们研究了多层换能器的晶体取向和频率特性。换能器的X射线衍射分析和扫描电子显微镜分析表明，在ZnO层沉积的初始阶段，c轴法线ZnO层生长在Au（111）层上。随着ZnO晶粒生长的进行，c轴正常生长转变为c轴倾斜ZnO层生长。这种多层换能器激发的第二泛音模式的纵向和剪切波，以及在UHF范围内的基本模式。因此，多层换能器的频率带宽比由c轴倾斜的ZnO层组成的单层换能器的频率带宽更宽。
Wideband ultrasonic transducers are required for acoustic imaging and nondestructive evaluation. In this study, we have fabricated transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer on the Au(111)/Ti/silica glass substrate. We have investigated the crystalline orientations and frequency characteristics of the multilayer transducer. An X-ray diffraction analysis and a scanning electron microscopy analysis of the transducer revealed that the c-axis normal ZnO layer was grown on the Au(111) layer during the initial stage of ZnO layer deposition. As ZnO grain growth proceeded, c-axis normal growth change to the c-axis tilted ZnO layer growth. This multilayer transducer excited second-overtone modes of longitudinal and shear waves as well as the fundamental mode in the UHF range. Therefore, the frequency bandwidth of the multilayer transducer was broader than that of a single layer transducer consisting of a c-axis tilted ZnO layer.