Low-energy electron excitation effect on formation of graphene nanocrystallites during carbon film growth process
Low-energy electron excitation effect on formation of graphene nanocrystallites during carbon film growth process
复制标题
碳膜生长过程中低能电子激发对石墨烯纳米微晶形成的影响
DOI：
10.1063/1.4990117
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发表时间：
2017
影响因子：
4
通讯作者：
Diao Dongfeng
中科院分区：
文献类型：
--
作者：
Chen Wencong;Zhang Xi;Diao Dongfeng
我们报告了一个低能量的电子激发效应的形成嵌入在碳膜中的电子回旋共振等离子体的石墨烯纳米晶体。在这项工作中，碳膜沉积在不同的照射电子能量和通量监测使用减速场能量分析仪，而沉积温度测量使用红外温度计。我们发现，石墨烯纳米晶的尺寸和浓度强烈地依赖于辐照电子能量和电子通量，而不依赖于温度，这表明共价键的电子激发效应主导了这些纳米晶的形成过程。这一发现揭示了2D材料的新制造方法。
We report a low-energy electron excitation effect on the formation of graphene nanocrystallites embedded in carbon films in an electron cyclotron resonance plasma. In this work, carbon films were deposited at different irradiation electron energies and fluxes monitored using a retarding field energy analyzer, while the deposition temperature was measured using an infrared thermometer. We found that the size and concentration of graphene nanocrystallites strongly depend on the irradiation electron energy and the electron flux but not the temperature, which indicates that the electron excitation effect of the covalent bonds dominates the formation process of these nanocrystallites. This finding shed light on the new fabrication method of 2D materials.