Electrochromism in surface modified crystalline WO3 thin films grown by reactive DC magnetron sputtering
Electrochromism in surface modified crystalline WO3 thin films grown by reactive DC magnetron sputtering
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DOI：
10.1016/j.apsusc.2013.05.051
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发表时间：
2013-10-01
影响因子：
6.7
通讯作者：
Karuppasamy, A.
中科院分区：
文献类型：
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作者：
Karuppasamy, A.
在本工作中，通过将溅射功率密度和氩气压力分别保持在3.0 W/cm（2）和1.2 x 10（-2）mbar，在不同的氧室压力（1.0-5.0 x 10（-3）mbar）下沉积氧化钨薄膜。研究了结晶氧化钨薄膜的表面形貌和孔隙率对电致变色性能的影响。XRD和拉曼光谱研究表明，在450 ℃空气中退火3.0 h后，所有样品均为单斜晶系的氧化钨（W 18 O 49）。虽然材料的相是无关紧要的氧分压的变化（P-O2），形貌和薄膜密度显示出显着的依赖于P-O2。系统地研究了等离子体（OES）、形貌、光学和电致变色性能，发现在氧分压为2.0 × 10（-3）mbar的条件下制备的氧化钨薄膜具有较好的着色效率（58 cm（2）/C）、电子/离子容量（Qc：-25 mC/cm（2））和可逆性（92%）。这归因于增强的表面性质，如高密度的孔和细颗粒（100 nm），以及膜的较小的体积密度（rho/rho（o）= 0.84），这有利于质子和电子的嵌入/脱嵌过程。这些结果显示了稳定和有效的基于结晶氧化钨的电致变色器件应用的良好前景。(C)2013爱思唯尔有限公司版权所有。
In the present work, tungsten oxide thin films were deposited at various oxygen chamber pressures (1.0-5.0 x 10(-3) mbar) by maintaining the sputtering power density and argon pressure constant at 3.0 W/cm(2) and 1.2 x 10(-2) mbar, respectively. The role of surface morphology and porosity on the electrochromic properties of crystalline tungsten oxide thin films has been investigated. XRD and Raman studies reveal that all the samples post annealed at 450 degrees C in air for 3.0 h settle in monoclinic crystal system of tungsten oxide (W18O49). Though the phase of material is indifferent to oxygen pressure variations (P-O2), morphology and film density shows a striking dependence on P-O2. A systematic study on plasma (OES), morphology, optical and electrochromic properties of crystalline tungsten oxide reveal that the films deposited at P-O2 of 2.0 x 10(-3) mbar exhibit better coloration efficiency (58 cm(2)/C), electron/ion capacity (Qc: -25 mC/cm(2)), and reversibility (92%). This is attributed to the enhanced surface properties like high density of pores and fine particulates (100 nm) and to lesser bulk density of the film (rho/rho(o) = 0.84) which facilitates the process of intercalation/de-intercalation of protons and electrons. These results show good promise toward stable and efficient crystalline tungsten oxide based electrochromic device applications. (C) 2013 Elsevier B.V. All rights reserved.