Effect of Boron Dopant of Si (001) Substrates on Growth of Ge Layers using Sputter Epitaxy Method, Abs
Effect of Boron Dopant of Si (001) Substrates on Growth of Ge Layers using Sputter Epitaxy Method, Abs
复制标题
使用溅射外延法,Si (001) 衬底的硼掺杂剂对 Ge 层生长的影响,Abs
DOI:
--
复制
发表时间:
2013
期刊:
影响因子:
--
通讯作者:
Toshiaki Matsui and Yoshiyuki Suda
中科院分区:
文献类型:
--
作者:
Takahiro Tsukamoto;Akifumi Kasamatsu;Nobumitsu Hirose;Takashi Mimura;Toshiaki Matsui and Yoshiyuki Suda