Molecular dynamics simulation of processing using AFM pin tool
Molecular dynamics simulation of processing using AFM pin tool
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DOI:
10.1016/j.apsusc.2005.09.005
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发表时间:
2006-08
影响因子:
6.7
通讯作者:
Yongda Yan;T. Sun;S. Dong;Xichun Luo;Yingchun Liang
中科院分区:
文献类型:
--
作者:
Yongda Yan;T. Sun;S. Dong;Xichun Luo;Yingchun Liang
A three-dimensional molecular dynamics (MD) model is utilized to investigate the effect of tool geometry on the deformation process of the workpiece and the nature of deformation process at the atomic-scale. Results show that different states exist between the atomic force microscope (AFM) pin tool and the workpiece surface, i.e. the non-wear state, the ploughing state, the state in which ploughing is dominant and the state in which cutting plays a key role. A relationship between the deformation process of the workpiece and the potential energy variation is presented. The potential energy variation of atoms in different deformed regions in the workpiece such as plastically deformed region, elastically deformed region and the mixed deformation region is different. The features of variations of potential energy are discussed.