In-Plane Oblique Pulsed-Laser Deposition and Its Application to the Fabrication of Metal Oxide Nanoconstrictions
In-Plane Oblique Pulsed-Laser Deposition and Its Application to the Fabrication of Metal Oxide Nanoconstrictions
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DOI：
10.7567/apex.6.035201
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发表时间：
2013-03-01
影响因子：
2.3
通讯作者：
Tanaka, Hidekazu
中科院分区：
文献类型：
--
作者：
Kushizaki, Takayoshi;Fujiwara, Kohei;Tanaka, Hidekazu
我们提出了一种新的方法来制造局部修改厚度的金属氧化物纳米结构。利用纳米级的阴影效应诱导的三维纳米模板图案在衬底上，我们证明了脉冲激光沉积在一个平面内倾斜的配置，使我们能够本地生长的氧化物。对生长位置的分析表明，只需调整少量的几何参数就可以精确地确定生长位置。通过控制入射方位角和生长时间，制备了瓶颈宽度为65 nm，长度为53 nm的铁磁氧化物Fe2.5Zn0.5O4纳米收缩结构。(C)2013日本应用物理学会
We propose a novel approach to fabricate metal oxide nanostructures with locally modified thicknesses. Utilizing a nanoscale shadowing effect induced by a three-dimensional nanotemplate patterned on a substrate, we demonstrate that pulsed-laser deposition in an in-plane oblique configuration enables us to locally grow an oxide. The analysis on the growth position reveals that it can be precisely defined by adjusting only a few geometrical parameters. A ferromagnetic oxide Fe2.5Zn0.5O4 nanoconstriction with a bottleneck width of 65nm and a length of 53nm is fabricated by controlling the incident azimuthal angle and growth duration in sequential deposition processes. (C) 2013 The Japan Society of Applied Physics