Principles of electrochemical micro- and nano-system technologies
Principles of electrochemical micro- and nano-system technologies
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DOI：
10.1016/s0013-4686(01)00584-9
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发表时间：
2001-09
影响因子：
6.6
通讯作者：
J. Schultze;A. Bressel
中科院分区：
文献类型：
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作者：
J. Schultze;A. Bressel
本文介绍了这一特刊和相应的书籍《电化学微纳系统技术》(Elsevier)。微电偶、工程学、电化学材料科学、电分析和生物学展示了跨学科的方面。此外，还描述了不断缩小到分子系统的规模。实验参数，如地形、电流密度、场强和流体动力学均以双对数曲线表示。反应类型和材料性质决定了本地化的可能性和生产速度。引入EMT数是为了区分无掩模过程：非定域化2D条件(EMT和GT；1)和定域化3D过程(EMT≪1)可以区分。可以使用微电极阵列或微机械设备来实现纳米级定位。微观局部元素在不想要的腐蚀或有意的结构(如磷化)中起着重要作用。文中给出了技术应用实例，并以磷化为例，用流程图和布尔拜克斯图进行了描述。
The paper gives an introduction to this Special Issue and corresponding book ‘Electrochemical Micro- and Nano-System Technologies’ (Elsevier). Interdisciplinary aspects are demonstrated by microgalvanics, engineering, electrochemical materials science, electroanalysis and biology. Moreover, the continuous scaling down to molecular systems is described. Experimental parameters like topography, current densities, field strengths and hydrodynamics are characterised in double logarithmic plots. Types of reactions and materials properties determine the possibility of localisation and production rate. The EMT-number is introduced to differentiate maskless processes: delocalising 2D conditions (EMT>1) can be distinguished from localising 3D processes (EMT≪1). Nanoscopic localisation can be achieved using microelectrode arrays or micromechanical devices. Microscopic local elements play an important role in unwanted corrosion or intended structuring like phosphating. Examples of technical EMST applications are given and, for the case of phosphating, characterised in a flow-diagram and the Pourbaix-diagram.