A Nano Positioning Platform for STM and Its Compound Control Algorithm
A Nano Positioning Platform for STM and Its Compound Control Algorithm
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DOI：
10.1109/tim.2021.3130307
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发表时间：
2022-01-01
影响因子：
5.6
通讯作者：
Wang, Xin
中科院分区：
文献类型：
--
作者：
Fan, Xian-Guang;Zhi, Yu-Liang;Wang, Xin
纳米定位平台广泛应用于扫描隧道显微镜（STM）等微纳测量领域，成为不可或缺的多维驱动执行机构。一个好的定位平台是由精密的机械结构、信号检测的硬件电路和软件控制算法组成的。然而，压电作动器作为一种常用的驱动器，其非线性滞回特性影响了定位精度。因此，解决非线性问题对精确跟踪具有重要意义。本文搭建了一个用于STM的纳米定位平台。提出了Bouc & x2013复合控制算法；文模型与模糊& x2013；比例& x2013；积分& x2013；用于STM补偿和处理PZT & x2019的导数（PID）；磁滞。首先是boc & x2013；建立模型后，利用遗传算法对模型参数进行辨识，计算出离散模型的逆数据。然后，将模糊理论应用于参数& x2019；传统PID算法的自整定。最后，采用开环和闭环相结合的复合控制，实现了响应快、超调小、精度高、稳定性好。实验结果表明，该算法适用于自制的STM纳米定位平台，具有体积小、结构开放、二次变换方便、易拆卸、自整定等特点，可大大改善磁滞非线性，实现精确定位。
Nano positioning platform, which is widely used in micro and nano measurement field such as scanning tunneling microscope (STM), becomes an indispensable multi-dimensional driving actuator. A good positioning platform is composed of precise mechanical structure, hardware circuits of signal detection, and software control algorithms. However, the nonlinear hysteresis characteristics of piezoelectric actuator (PZT), a common driver, affect the positioning accuracy. Therefore, it is significant to solve the nonlinearity for precise tracking. A nano positioning platform for STM is set up in this article. We propose a compound control algorithm of Bouc & x2013;Wen model and fuzzy & x2013;proportional & x2013;integral & x2013;derivative (PID) for STM to compensate and handle PZT & x2019;s hysteresis. First, the Bouc & x2013;Wen model is established, whose parameters are identified by the genetic algorithm (GA), and the inverse discrete model data can be calculated. Then, the fuzzy theory is applied to the parameters & x2019; self-tuning of the traditional PID algorithm. Finally, the compound control combines open loop and closed loop, which achieves fast response, low overshoot, high precision, and favorable stability. The experimental results show that the proposed algorithm suitable for self-made STM nano positioning platform with small volume, open structure, convenient secondary transformation, easy disassembly, and self-tuning function can greatly improve the hysteresis nonlinearity and realize the accurate positioning.