Development of Novel Polishing System by Use of Acoustic trap

Development of Novel Polishing System by Use of Acoustic trap
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利用声阱开发新型抛光系统

DOI:
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发表时间:
2012
期刊:
Key Engineering Materials
影响因子:
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通讯作者:
Libo Zhou
Libo Zhou
中科院分区:
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文献类型:
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作者:
Tomohiro Inada;Hirotaka Ojima;Libo Zhou

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